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published an article in December 2017.
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Raffaele Caroselli

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Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera s/n, 46022 Valencia, Spain

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Article 2 Reads 1 Citation Real-Time and In-Flow Sensing Using a High Sensitivity Porous Silicon Microcavity-Based Sensor Raffaele Caroselli, David Martín Sánchez, Salvador Ponce Alc... Published: 05 December 2017
Sensors, doi: 10.3390/s17122813
DOI See at publisher website PubMed View at PubMed ABS Show/hide abstract
Porous silicon seems to be an appropriate material platform for the development of high-sensitivity and low-cost optical sensors, as their porous nature increases the interaction with the target substances, and their fabrication process is very simple and inexpensive. In this paper, we present the experimental development of a porous silicon microcavity sensor and its use for real-time in-flow sensing application. A high-sensitivity configuration was designed and then fabricated, by electrochemically etching a silicon wafer. Refractive index sensing experiments were realized by flowing several dilutions with decreasing refractive indices, and measuring the spectral shift in real-time. The porous silicon microcavity sensor showed a very linear response over a wide refractive index range, with a sensitivity around 1000 nm/refractive index unit (RIU), which allowed us to directly detect refractive index variations in the 10−7 RIU range.